Full display

  • Abstract:
    The document specifies a method for testing hydrofluoric acid for the metal traces of cobalt (Co), chromium (Cr), copper (Cu), iron (Fe), and nickel (Ni) relevant to semiconductor technology. Emission spectroscopy with plasma excitation (for example, inductively coupled plasma (ICP) or direct current plasma (DCP)) is used for the determination. The range of application covers trace element mass fractions from 1 ng/g to 1000 ng/g.
  • Document number:
    DIN 50451-2
  • Issuing date:
  • Document type:
  • Title:
    Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy
  • Replaces:
    DIN 50451-2(1990-10); DIN 50451-2(2002-01)
  • Author:
    Materials Testing Standards Committee
  • Search term:
    Acids; Analysis; Assay; Calcium; Calibration; Chemical; Chemical analysis and testing; Chemistry; Chromium; Cleaning; Cobalt; Copper; Definitions; Determination of content; Emission; Emission spectrophotometry; High-purity; Hydrofluoric acid; Instruments; Iron; Liquids; Materials; Materials testing; Metals; Nickel; Plasma; Reagents; Sampling methods; Semiconductor engineering; Semiconductor technology; Semiconductors; Superpurity water; Technology; Test results; Testing; Trace element analysis; Trace elements; Zinc
  • Application areas:
    20.20 Feststoffe
  • Hazards:
    AB Terminologische Festlegungen in Normen mit Arbeitsschutzbezug; AC Mess- und Prüfverfahren für die Ermittlung von Belastungen und Gefährdungen; CA Chemische Gefährdungen im Allgemeinen
  • ICS:
    29.045 Semiconducting materials
  • Price:
    49,00 EUR
  • Cross references:
    DIN 51008-2 (2001-12)<G>; DIN EN ISO 1042 (1999-08)<G>; DIN ISO 3696 (1991-06)<G>; DIN 8120-1 (1981-07)<G>; DIN 32645 (2008-11)<G>; DIN EN ISO 17294-2 (2017-01)<G>; DIN 51401 (2016-11)<G>; DIN 51401 Beiblatt 1 (2017-07)<G>; DIN EN ISO 1043-1 (2016-09)<G>; DIN EN ISO 8655-2 (2022-11)<G>; DIN EN ISO 14644-1 (2016-06)<G>; ASTM D 5127 (2013)<G>; VDI 2083 Blatt 1 (2022-07)<G>
  • Update flag: